wetetching相关论文
A wet-chemical etching technique has been used to prepare silicon arrays.The low reflectance has been identified as bein......
Recently,transparent amorphous oxide semiconductors such as Ga-In-Zn-O (a-GIZO),In-Sn-O (ITO),Zn-O (ZnO),In-Ga-O (IGO) a......
The studies of light-trapping properties of nanosized texture and its application to the crystalline
...
针对当前薄膜太阳电池对光管理的迫切需求,本文采用磁控溅射及后腐蚀技术制备获得了高性能绒面铝掺杂氧化锌前电极.深入分析了氧化......
This paper demonstrates a noval electro-thermal micro actuator design,fabrication and device tests that combines microfl......
探讨亚微米掺铝氧化锌（AZO）光栅的漫透射光谱特性。在AZO薄膜上涂布光刻胶，用325 nm激光双光束干涉曝光得到掩模图案。将其置于质量分......
利用飞秒激光辐照结合湿法腐蚀方法，制备了高纵横比硅基狭槽。首先利用透镜聚焦飞秒激光至硅片表面，在硅内部诱导结构变化；再结合氢氟......
对柔性GaAs基太阳电池的制备方法进行研究, 报道了一种用于制备柔性倒置生长的AlGaInP/AlGaAs/GaAs三结太阳电池的剥离和转移方法......
在氧化物限制型垂直腔面发射激光器制备中,刻蚀GaAs/AlGaAs时因异质型材料常出现选择性内蚀现象,这会直接影响后续的氧化工艺及电......
晶体材料微加工技术是制备微电子器件、微机电系统器件的关键技术。飞秒激光辐照结合湿法腐蚀加工技术不仅可以去除飞秒激光诱导微......
熔石英光学元件经过精密加工后亚表面存在大量缺陷，这些缺陷在强激光辐照下易引发激光诱导损伤，威胁熔石英元件在紫外激光（351 nm/355......
氧化铟锡(ITO)导电膜具有电阻率低、透光性好、耐高温等优点,在光电领域具有重要应用。现有加工方法得到的ITO电极尺寸一般为10~20......
Fabrication of 3D solenoid microcoils in silica glass by femtoseconc laser wet etch and microsolidic
This paper reports a flexible fabrication method for 3D solenoid microcoils in silica glass.The method consists of f......
